NPZ70-207
High-precision piezo stage
Compact, flexure-guided actuator made of Super Invar.
Part Number | 3715207 |
Footprint | 85mm H x 20mm ∅ |
Diameter | Super Invar |
Material | Super Invar |
Maximum Load | 1 kg |
Max Force (Push/Pull) | 100N/20N |
Stage Mass | 180g |
Nanomotion Control | Z |
Closed-loop Travel | 70µm |
Open-loop Travel (-30 to 150 V) | 100µm |
Position Noise | 0.5nm |
Stiffness | 11.0N/µm |
Resonant Frequency | 2000Hz |
Settling Time | 5ms |
Linearity Deviation | 0.01% |
Capacitance | 4.8µF |
Integrated Sensor | Capacitive |
Cable Length | 2m |
Controller | LC.400 |
Related Resources: