NPXY90-498
High-precision piezo stage
XY piezo stage developed for rapid scanning in alignment tools
| Part Number | 3715498 |
| Footprint | 84mm W x 84mm D x 18mm H |
| Aperture | 27mm ∅ |
| Material | Stainless Steel |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/70N |
| Stage Mass | 520g |
| Nanomotion Control | XY |
| Closed-loop Travel | 90µm|90µm |
| Open-loop Travel (-30 to 150 V) | 120µm|120µm |
| Position Noise | 0.5nm|0.5nm |
| Stiffness | 2.3N/µm|2.3N/µm |
| Resonant Frequency | 900Hz|900Hz |
| Settling Time | 4ms|4ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 4.3µF|4.3µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
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Related Resources:
What is a Piezo Flexure Stage?
A Piezo Stage can be characterized as a mechanical device, driven by a piezoelectric actuator, which provides one or more axis of motion.