NPXY50Z20-477
Compact, high-precision piezo stage
XYZ nanopositioning piezo stage with high resonant frequency and compact design allowing easy integration in space constrained applications that require precision control. Designed for scanning applications such as AFM.
Part Number | 3715477 |
Footprint | 60mm W x 60mm D x 31mm H |
Material | Stainless Steel |
Maximum Load | 1kg |
Max Force (Push/Pull) | 100N/10N |
Stage Mass | 365g |
Nanomotion Control | XYZ |
Closed-loop Travel | 50µm|50µm|20µm |
Open-loop Travel (-30 to 150 V) | 65µm|65µm|35µm |
Position Noise | 0.2nm|0.2nm|0.1nm |
Stiffness | 3N/µm|3N/µm|14N/µm |
Resonant Frequency | 1200Hz|1200Hz|2000Hz |
Settling Time | 4ms|4ms|2ms |
Linearity Deviation | 0.01%|0.01%|0.1% |
Capacitance | 2.8µF|2.8µF|1.6µF |
Integrated Sensor | Capacitive |
Cable Length | 2m |
Controller | LC.403 |
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