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Hexagonal shapes

NPXY100Z50-244

Large-aperture 3-axis piezo stage

NPXY100Z50-244 Nanopositioning Piezo Stage

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

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Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Part Number3715244
Footprint140mm W x 140mm D x 38mm H
DiameterNA
Aperture68mm W x 68mm D
MaterialAluminum
Maximum Load5kg
Max Force (Push/Pull)100N/20N
Stage Mass1090g
Nanomotion ControlXYZ
Closed-loop Travel100µm|100µm|50µm
Open-loop Travel (-30 to 150 V)160µm|160µm|80µm
Position Noise0.3nm|0.3nm|0.3nm
Stiffness1.6N/µm|1.6N/µm|4.7N/µm
Resonant Frequency400Hz|400Hz|550Hz
Settling Time10ms|10ms|10ms
Linearity Deviation0.01%|0.01%|0.05%
Capacitance4.8µF|4.8µF|4.8µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

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