NPXY100Z50-244
Large-aperture 3-axis piezo stage
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Part Number | 3715244 |
Footprint | 140mm W x 140mm D x 38mm H |
Diameter | NA |
Aperture | 68mm W x 68mm D |
Material | Aluminum |
Maximum Load | 5kg |
Max Force (Push/Pull) | 100N/20N |
Stage Mass | 1090g |
Nanomotion Control | XYZ |
Closed-loop Travel | 100µm|100µm|50µm |
Open-loop Travel (-30 to 150 V) | 160µm|160µm|80µm |
Position Noise | 0.3nm|0.3nm|0.3nm |
Stiffness | 1.6N/µm|1.6N/µm|4.7N/µm |
Resonant Frequency | 400Hz|400Hz|550Hz |
Settling Time | 10ms|10ms|10ms |
Linearity Deviation | 0.01%|0.01%|0.05% |
Capacitance | 4.8µF|4.8µF|4.8µF |
Integrated Sensor | Capacitive |
Cable Length | 2m |
Controller | LC.403 |
Related Resources: