NPXY Series
High-precision piezo stage
Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.
| Part Number | 3715102 |
| Footprint | 100mm W x 100mm D x 35mm H |
| Diameter | NA |
| Aperture | 38mm ∅ |
| Material | Aluminum |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/10N |
| Stage Mass | 560g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|25µm |
| Open-loop Travel (-30 to 150 V) | 130µm|130µm|35µm |
| Position Noise | 0.3nm|0.3nm|0.1nm |
| Stiffness | 1.3N/µm|1.3N/µm|15.5N/µm |
| Resonant Frequency | 500Hz|500Hz|1600Hz |
| Settling Time | 8ms|8ms|3ms |
| Linearity Deviation | 0.01%|0.01%|0.04% |
| Capacitance | 4.8µF|4.8µF|3.1µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |
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Related Resources:
What is a Piezo Flexure Stage?
A Piezo Stage can be characterized as a mechanical device, driven by a piezoelectric actuator, which provides one or more axis of motion.