NPXY100Z10-128
Large-aperture 3-axis piezo stage
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
| Part Number | 3715128 |
| Footprint | 140mm W x 140mm D x 30mm H |
| Diameter | NA |
| Aperture | 68mm W x 68mm D |
| Material | Aluminum |
| Maximum Load | 5kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 870g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|10µm |
| Open-loop Travel (-30 to 150 V) | 160µm|160µm|15µm |
| Position Noise | 0.3nm|0.3nm|0.1nm |
| Stiffness | 3.0N/µm|3.0N/µm|6.2N/µm |
| Resonant Frequency | 600Hz|600Hz|900Hz |
| Settling Time | 10ms|10ms|5ms |
| Linearity Deviation | 0.01%|0.01%|0.02% |
| Capacitance | 4.8µF|4.8µF|1.0µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |
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Related Resources:
What is a Piezo Flexure Stage?
A Piezo Stage can be characterized as a mechanical device, driven by a piezoelectric actuator, which provides one or more axis of motion.