NPXY Series
High-precision piezo stage
Ultra-precise XY nanopositioning piezo stage developed for metrology applications.
| Part Number | 3715100 |
| Footprint | 100mm W x 100mm D x 23mm H |
| Diameter | NA |
| Aperture | 40mm ∅ |
| Material | Aluminum |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 460g |
| Nanomotion Control | XY |
| Closed-loop Travel | 100µm|100µm |
| Open-loop Travel (-30 to 150 V) | 160µm|160µm |
| Position Noise | 0.3nm|0.3nm |
| Stiffness | 1.2N/µm|1.2N/µm |
| Resonant Frequency | 700Hz|700Hz |
| Settling Time | 6ms|6ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 2.4µF|2.4µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
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Related Resources:
What is a Piezo Flexure Stage?
A Piezo Stage can be characterized as a mechanical device, driven by a piezoelectric actuator, which provides one or more axis of motion.