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Hexagonal shapes

NPX60-223

High-precision piezo stage

Compact, high-speed nanopositioning piezo stage with sub-nm resolution.

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Compact, high-speed nanopositioning piezo stage with sub-nm resolution.

Part Number3715223
Footprint70mm W x 60mm D x 25mm H
MaterialAluminum
Maximum Load1kg
Max Force (Push/Pull)100N/20N
Stage Mass230g
Nanomotion ControlX
Closed-loop Travel60µm
Open-loop Travel (-30 to 150 V)90µm
Position Noise0.2nm
Stiffness3.7N/µm
Resonant Frequency1200Hz
Settling Time4ms
Linearity Deviation0.01%
Capacitance2µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.400

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