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Compact, 3-axis piezo stage
Compact XYZ nanopositioning piezo stage with 100µm range.
| Part Number | 3715464 |
| Footprint | 40mm W x 40mm D x 47mm H |
| Material | Aluminum/SS |
| Maximum Load | 1.5kg |
| Max Force (Push/Pull) | 15N |
| Stage Mass | 160g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|100µm |
| Open-loop Travel (-30 to 150 V) | 140µm|140µm|140µm |
| Position Noise | 3nm|3nm|3nm |
| Stiffness | 0.6N/µm|0.6N/µm|0.6N/µm |
| Resonant Frequency | 280Hz|430Hz|280Hz |
| Settling Time | 20ms|20ms|20ms |
| Linearity Deviation | 0.05%|0.05%|0.05% |
| Capacitance | 1.5µF|1.5µF|1.5µF |
| Integrated Sensor | Strain Gauge |
| Cable Length | 2m |
| Controller | LC.403 |
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Related Resources:
What is a Piezo Flexure Stage?
A Piezo Stage can be characterized as a mechanical device, driven by a piezoelectric actuator, which provides one or more axis of motion.