NPXY100Z25-264
Large-aperture 3-axis piezo stage
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Part Number | 3715264 |
Footprint | 140mm W x 140mm D x 35mm H |
Aperture | 68mm W x 68mm D |
Material | Aluminum |
Maximum Load | 1 kg |
Nanomotion Control | XYZ |
Closed-loop Travel | 100µm|100µm|25µm |
Position Noise | 0.3nm|0.3nm|0.2nm |
Resonant Frequency | 450Hz|450Hz|700Hz |
Settling Time | 10ms|10ms|5ms |
Linearity Deviation | 0.02%|0.02%|0.02% |
Controller | LC.403 |
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