NPXY200Z25-260
Large-aperture 3-axis piezo stage
Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.
Part Number | 3715260 |
Footprint | 140mm W x 140mm D x 35mm H |
Diameter | NA |
Aperture | 68mm W x 68mm D |
Material | Aluminum |
Maximum Load | 5kg |
Max Force (Push/Pull) | 100N/20N |
Stage Mass | 960g |
Nanomotion Control | XYZ |
Closed-loop Travel | 200µm|200µm|25µm |
Open-loop Travel (-30 to 150 V) | 240µm|240µm|35µm |
Position Noise | 0.7nm|0.7nm|0.2nm |
Stiffness | 2.8N/µm|2.8N/µm|2.7N/µm |
Resonant Frequency | 350Hz|350Hz|600Hz |
Settling Time | 15ms|15ms|5ms |
Linearity Deviation | 0.01%|0.01%|0.02% |
Capacitance | 7.5µF|7.5µF|1.9µF |
Integrated Sensor | Capacitive |
Cable Length | 2m |
Controller | LC.403 |
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