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Hexagonal shapes

NPXY300-291

Low-profile large aperture piezo stage

NPXY300-291 Nanopositioning Piezo Stage

Fast, large aperture, 300 micron XY nanopositioning piezo stage

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Fast, large aperture, 300 micron XY nanopositioning piezo stage

Part Number3715291
Footprint179mm X 179mm X 23mm H
DiameterNA
Aperture85mm X 95mm
MaterialAluminum
Maximum Load5kg
Max Force (Push/Pull)100N/20N
Stage Mass1560g
Nanomotion ControlXY
Closed-loop Travel300µm|300µm
Open-loop Travel (-30 to 150 V)360µm|360µm
Position Noise1nm|1nm
Stiffness0.7N/µm|0.7N/µm
Resonant Frequency240Hz|240Hz
Settling Time20ms|20ms
Linearity Deviation0.01%|0.01%
Capacitance8.2µF|8.2µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.402

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